The first phase of Xi'an Yiswei silicon wafer project mainly builds 12-inch (300 mm) silicon monocrystalline polishing wafers and epitaxial wafers for integrated circuits, including production plants, crystal pulling plants, comprehensive power plants, wastewater treatment stations, solid waste stations, gas warehouses, chemical warehouses, bulk gas stations, doormen and other buildings.
The main production process is carried out in a closed space with a certain temperature, humidity and cleanliness, 7 days a week, 24 hours a day continuous production, high degree of automation, maintenance of production requires a variety of gases, chemicals, water systems and other support. It has high requirements for the stability and reliability of electricity quality, and once continuous production is disrupted due to power problems, it takes a long time to recover.
This project needs to be harmonic treatment for the heating furnace load, the furnace will produce a large number of harmonic currents when working, the harmonics generated not only affect the normal operation of its own equipment, but also inject into the power grid to affect the load of other branches connected by the public connection point, bringing serious power quality problems to the system, which is not conducive to the safe operation of power supply equipment.
The 3rd harmonic in the semiconductor industry is very serious, mainly due to the large number of single-phase rectifier equipment used in production. The third harmonic belongs to the zero-sequence harmonic, which has the characteristics of convergence in the neutral line, resulting in excessive pressure of the neutral line, there will be ignition phenomenon, and there are hidden production safety hazards. Harmonics can also cause circuit breakers to trip, delaying production time. The third harmonic forms a circulating current in the transformer, which accelerates the aging of the transformer. Severe harmonic pollution affects the efficiency and longevity of equipment in power distribution systems.
For the low-voltage power supply system of this project, BW-APF active filter device is added to each heating furnace on site to carry out harmonic control, which can effectively ensure the quality of power supply.
The production line of this project is equipped with Bowo active power filter APF, which effectively compensates for the characteristic and sub-harmonics generated by load operation, eliminates the influence of harmonics on the production process, ensures the safe operation of electrical equipment, improves the stability of the power distribution system, improves the load capacity of transformers, and saves investment in equipment replacement.
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